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Silicon Sensing CMS390 (Orthogonal) MEMS Combi-Sensor

Silicon Sensing CMS390 (Orthogonal) MEMS Combi-Sensor

High-Precision Gyroscope and Accelerometer

Silicon Sensing CMS390 (Orthogonal) MEMS Combi-Sensor combines a 3-axis gyroscope and accelerometer for precise inertial measurements. Featuring high stability and low drift, CMS390 is designed for applications requiring accurate motion sensing, such as aerospace, industrial automation, and robotics. Its compact and rugged design ensures reliable performance in harsh environments, making it an ideal choice for demanding applications where precision and durability are critical.

CMS390 MEMS Combi-Sensor Technical Specifications

Supply Voltage

3.3V

Angular Random Walk

0.40º/√hr

Bias Instability

10°/hr

Bandwidth (nominal)

45, 55, 90 or 110Hz Acc; 45, 62, 95 or 190Hz (user selectable)

Operating Temperature

-40°C to +125°C

Current Consumption

8mA

Velocity Random Walk

<0.05 m/s/√h

Noise Spectral Density Gyro

0.1 °/s rms

Noise Spectral Density Acc

1mg rms

Vibration Rectification (ACC)

0.001°/s/g2 rms to 0.003°/s/g2 rms

Rate SF over Temp

±2.0%

Rate Bias Over Temperature

±1.0˚/s typ ±1.75˚/s max

Acc Bias over Temp

±30mg to ±75mg

Acc SF over Temp

±2.5%

Baud Rate

SPI msg rate max 10kHz clock rate 7MHz

Accelerometer Bias Instability

<0.05mg

Vibration Rectification Error

0.001°/s/g2 rms to 0.003°/s/g2 rms

Why Choose the CMS390 MEMS Combi-Sensor?

  • Small (10.4 x 6.7 x 2.7mm)

  • Proven and robust silicon MEMS vibrating ring gyro and dual-axis accelerometer

  • Excellent bias over temperature (1.75˚/s, 30mg)

  • Flat and orthogonal mounting options (CMS300 and CMS390)

  • User selectable dynamic ranges (150˚/s, 300˚/s, 2.5g and 10g)

  • Digital (SPI®) output mode

  • User selectable bandwidth (Rate; 45, 55, 90 or 110Hz Acc; 45, 62, 95 or 190Hz)

  • Range and bandwidth independently selectable for each axis

  • Low power consumption (8mA) from 3.3V supply

  • High shock and vibration rejection

  • Temperature range -40 +125˚C

  • Hermetically sealed ceramic LCC surface mount package for temperature and humidity resistance

  • Integral temperature sensor

  • RoHS compliant

What Is the CMS390 MEMS Combi-Sensor Used For?

Typical applications of the CMS390 MEMS Combi-Sensor include:

  • Precision inertial navigation systems

  • Structural health and vibration monitoring

  • Platform leveling and tilt measurement

  • Aerospace and defense motion sensing

Ordering Information

Part Number CMS390:

Single-axis (Z) rate and dualaxis (X,Y) MEMS Combi-Sensor. Z-axis parallel to the host PCBA.

Part number CMS390- EVB:

Evaluation Board for the CMS390 Combi-Sensor. (includes the sensor)

Frequently Asked Questions

What is the CMS390 MEMS Combi-Sensor?

Silicon Sensing CMS390 (Orthogonal) MEMS Combi-Sensor combines a 3-axis gyroscope and accelerometer for precise inertial measurements. Featuring high stability and low drift, CMS390 is designed for applications requiring accurate motion sensing, such as aerospace, industrial automation, and robotics.

What should I look for when selecting an accelerometer like the CMS390 MEMS Combi-Sensor?

Key criteria are measurement range, bias stability, noise density and temperature behavior — all listed in the specifications above. The CMS390 MEMS Combi-Sensor offers MEMS reliability with performance suited to demanding navigation and monitoring tasks.

Where is the CMS390 MEMS Combi-Sensor available?

The CMS390 MEMS Combi-Sensor is available through Leo Drive in the following region: Turkey. For other regions, please contact Leo Drive.

How can I get the datasheet and technical documents for the CMS390 MEMS Combi-Sensor?

The datasheet, user manual and other technical documents for the CMS390 MEMS Combi-Sensor are available on the manufacturer’s website. You can also contact Leo Drive for documentation and integration support.

Explore More at Leo Drive

The CMS390 MEMS Combi-Sensor is part of the MEMS Accelerometers range at Leo Drive. Browse all autonomous vehicle sensors and components, or talk to our engineering team about integration in your project.

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