Silicon Sensing CMS390 (Orthogonal) MEMS Combi-Sensor
High-Precision Gyroscope and Accelerometer
Silicon Sensing CMS390 (Orthogonal) MEMS Combi-Sensor combines a 3-axis gyroscope and accelerometer for precise inertial measurements. Featuring high stability and low drift, CMS390 is designed for applications requiring accurate motion sensing, such as aerospace, industrial automation, and robotics. Its compact and rugged design ensures reliable performance in harsh environments, making it an ideal choice for demanding applications where precision and durability are critical.
CMS390 MEMS Combi-Sensor Technical Specifications
Supply Voltage | 3.3V |
Angular Random Walk | 0.40º/√hr |
Bias Instability | 10°/hr |
Bandwidth (nominal) | 45, 55, 90 or 110Hz Acc; 45, 62, 95 or 190Hz (user selectable) |
Operating Temperature | -40°C to +125°C |
Current Consumption | 8mA |
Velocity Random Walk | <0.05 m/s/√h |
Noise Spectral Density Gyro | 0.1 °/s rms |
Noise Spectral Density Acc | 1mg rms |
Vibration Rectification (ACC) | 0.001°/s/g2 rms to 0.003°/s/g2 rms |
Rate SF over Temp | ±2.0% |
Rate Bias Over Temperature | ±1.0˚/s typ ±1.75˚/s max |
Acc Bias over Temp | ±30mg to ±75mg |
Acc SF over Temp | ±2.5% |
Baud Rate | SPI msg rate max 10kHz clock rate 7MHz |
Accelerometer Bias Instability | <0.05mg |
Vibration Rectification Error | 0.001°/s/g2 rms to 0.003°/s/g2 rms |
Why Choose the CMS390 MEMS Combi-Sensor?
Small (10.4 x 6.7 x 2.7mm)
Proven and robust silicon MEMS vibrating ring gyro and dual-axis accelerometer
Excellent bias over temperature (1.75˚/s, 30mg)
Flat and orthogonal mounting options (CMS300 and CMS390)
User selectable dynamic ranges (150˚/s, 300˚/s, 2.5g and 10g)
Digital (SPI®) output mode
User selectable bandwidth (Rate; 45, 55, 90 or 110Hz Acc; 45, 62, 95 or 190Hz)
Range and bandwidth independently selectable for each axis
Low power consumption (8mA) from 3.3V supply
High shock and vibration rejection
Temperature range -40 +125˚C
Hermetically sealed ceramic LCC surface mount package for temperature and humidity resistance
Integral temperature sensor
RoHS compliant
What Is the CMS390 MEMS Combi-Sensor Used For?
Typical applications of the CMS390 MEMS Combi-Sensor include:
Precision inertial navigation systems
Structural health and vibration monitoring
Platform leveling and tilt measurement
Aerospace and defense motion sensing
Ordering Information
Part Number CMS390:
Single-axis (Z) rate and dualaxis (X,Y) MEMS Combi-Sensor. Z-axis parallel to the host PCBA.
Part number CMS390- EVB:
Evaluation Board for the CMS390 Combi-Sensor. (includes the sensor)
Frequently Asked Questions
What is the CMS390 MEMS Combi-Sensor?
Silicon Sensing CMS390 (Orthogonal) MEMS Combi-Sensor combines a 3-axis gyroscope and accelerometer for precise inertial measurements. Featuring high stability and low drift, CMS390 is designed for applications requiring accurate motion sensing, such as aerospace, industrial automation, and robotics.
What should I look for when selecting an accelerometer like the CMS390 MEMS Combi-Sensor?
Key criteria are measurement range, bias stability, noise density and temperature behavior — all listed in the specifications above. The CMS390 MEMS Combi-Sensor offers MEMS reliability with performance suited to demanding navigation and monitoring tasks.
Where is the CMS390 MEMS Combi-Sensor available?
The CMS390 MEMS Combi-Sensor is available through Leo Drive in the following region: Turkey. For other regions, please contact Leo Drive.
How can I get the datasheet and technical documents for the CMS390 MEMS Combi-Sensor?
The datasheet, user manual and other technical documents for the CMS390 MEMS Combi-Sensor are available on the manufacturer’s website. You can also contact Leo Drive for documentation and integration support.
Explore More at Leo Drive
The CMS390 MEMS Combi-Sensor is part of the MEMS Accelerometers range at Leo Drive. Browse all autonomous vehicle sensors and components, or talk to our engineering team about integration in your project.

