Silicon Sensing CMS300 (In-Plane) MEMS Combi-Sensor
High-Precision Gyroscope and Accelerometer
Silicon Sensing CMS300 (In-Plane) MEMS Combi-Sensor integrates a high-precision gyroscope and accelerometer into a compact package. With low noise and low drift characteristics, it provides accurate and reliable motion sensing for a wide range of applications, including aerospace, industrial automation, and robotics. CMS300's robust design ensures consistent performance in demanding environments, making it a trusted choice for precise inertial measurements.
CMS300 MEMS Combi-Sensor Technical Specifications
Supply Voltage | 3.3V |
Angular Random Walk | 0.40º/√hr |
Bias Instability | 10°/hr |
Bandwidth (nominal) | 45, 55, 90 or 110Hz Acc; 45, 62, 95 or 190Hz (user selectable) |
Operating Temperature | -40°C to +125°C |
Typ. Current Consumption | 8mA |
Angular Rate Range | ±150°/s to ±300°/s |
Axes of Acceleration | 2 |
Acceleration Range | ±2.5 to ±10g |
Velocity Random Walk | <0.05 m/s/√hr |
Rate SF over Temp | ±2.0% |
Rate Bias Over Temperature | ±1.0˚/s typ ±1.75˚/s max |
Acc Bias over Temp | ±30mg to ±75mg |
Acc SF over Temp | ±2.5% |
Baud Rate | SPI msg rate max 10kHz clock rate 7MHz |
Accelerometer Bias Instability | <0.05mg |
Vibration Rectification Error | 0.001°/s/g2 rms to 0.003°/s/g2 rms |
Why Choose the CMS300 MEMS Combi-Sensor?
Small (10.4 x 6.0 x 2.2mm)
Proven and robust silicon MEMS vibrating ring gyro and dual-axis accelerometer
Excellent bias over temperature (1.75°/s, 30mg)
Flat and orthogonal mounting options (CMS300 and CMS390)
User selectable dynamic ranges
Digital (SPI®) output mode
User selectable bandwidth
Range and bandwidth independently selectable for each axis
Low power consumption (8mA) from 3.3V supply
High shock and vibration rejection
Temperature range -40 +125°C
Hermetically sealed ceramic LCC surface mount package for temperature and humidity resistance
Integral temperature sensor
RoHS compliant
What Is the CMS300 MEMS Combi-Sensor Used For?
Typical applications of the CMS300 MEMS Combi-Sensor include:
Precision inertial navigation systems
Structural health and vibration monitoring
Platform leveling and tilt measurement
Aerospace and defense motion sensing
Ordering Information
Part Number CMS300
Single-axis (Z) rate and dualaxis (X,Y) MEMS Combi-Sensor. Z-axis perpendicular to the host PCBA.
Part Number CMS300-EVB
Evaluation Board for the CMS300 Combi-Sensor (includes the sensor)
Frequently Asked Questions
What is the CMS300 MEMS Combi-Sensor?
Silicon Sensing CMS300 (In-Plane) MEMS Combi-Sensor integrates a high-precision gyroscope and accelerometer into a compact package. With low noise and low drift characteristics, it provides accurate and reliable motion sensing for a wide range of applications, including aerospace, industrial automation, and robotics.
What should I look for when selecting an accelerometer like the CMS300 MEMS Combi-Sensor?
Key criteria are measurement range, bias stability, noise density and temperature behavior — all listed in the specifications above. The CMS300 MEMS Combi-Sensor offers MEMS reliability with performance suited to demanding navigation and monitoring tasks.
Where is the CMS300 MEMS Combi-Sensor available?
The CMS300 MEMS Combi-Sensor is available through Leo Drive in the following region: Turkey. For other regions, please contact Leo Drive.
How can I get the datasheet and technical documents for the CMS300 MEMS Combi-Sensor?
The datasheet, user manual and other technical documents for the CMS300 MEMS Combi-Sensor are available on the manufacturer’s website. You can also contact Leo Drive for documentation and integration support.
Explore More at Leo Drive
The CMS300 MEMS Combi-Sensor is part of the MEMS Accelerometers range at Leo Drive. Browse all autonomous vehicle sensors and components, or talk to our engineering team about integration in your project.

