Silicon Sensing CMS300 (In-Plane) MEMS Combi-Sensor integrates a high-precision gyroscope and accelerometer into a compact package. With low noise and low drift characteristics, it provides accurate and reliable motion sensing for a wide range of applications, including aerospace, industrial automation, and robotics. CMS300's robust design ensures consistent performance in demanding environments, making it a trusted choice for precise inertial measurements.

Why Choose the CMS300 MEMS Combi-Sensor?

• Small (10.4 x 6.0 x 2.2mm)

• Proven and robust silicon MEMS vibrating ring gyro and dual-axis accelerometer

• Excellent bias over temperature (1.75°/s, 30mg)

• Flat and orthogonal mounting options (CMS300 and CMS390)

• User selectable dynamic ranges

• Digital (SPI®) output mode

• User selectable bandwidth

• Range and bandwidth independently selectable for each axis

• Low power consumption (8mA) from 3.3V supply

• High shock and vibration rejection

• Temperature range -40 +125°C

• Hermetically sealed ceramic LCC surface mount package for temperature and humidity resistance

• Integral temperature sensor

• RoHS compliant

What Is the CMS300 MEMS Combi-Sensor Used For?

Typical applications of the CMS300 MEMS Combi-Sensor include:

• Precision inertial navigation systems

• Structural health and vibration monitoring

• Platform leveling and tilt measurement

• Aerospace and defense motion sensing

Ordering Information

Part Number CMS300

Single-axis (Z) rate and dualaxis (X,Y) MEMS Combi-Sensor. Z-axis perpendicular to the host PCBA.

Part Number CMS300-EVB

Evaluation Board for the CMS300 Combi-Sensor (includes the sensor)

Frequently Asked Questions

What is the CMS300 MEMS Combi-Sensor?

Silicon Sensing CMS300 (In-Plane) MEMS Combi-Sensor integrates a high-precision gyroscope and accelerometer into a compact package. With low noise and low drift characteristics, it provides accurate and reliable motion sensing for a wide range of applications, including aerospace, industrial automation, and robotics.

What should I look for when selecting an accelerometer like the CMS300 MEMS Combi-Sensor?

Key criteria are measurement range, bias stability, noise density and temperature behavior — all listed in the specifications above. The CMS300 MEMS Combi-Sensor offers MEMS reliability with performance suited to demanding navigation and monitoring tasks.

Where is the CMS300 MEMS Combi-Sensor available?

The CMS300 MEMS Combi-Sensor is available through Leo Drive in the following region: Turkey. For other regions, please contact Leo Drive.

How can I get the datasheet and technical documents for the CMS300 MEMS Combi-Sensor?

The datasheet, user manual and other technical documents for the CMS300 MEMS Combi-Sensor are available on the manufacturer’s website. You can also contact Leo Drive for documentation and integration support.

Explore More at Leo Drive

The CMS300 MEMS Combi-Sensor is part of the MEMS Accelerometers range at Leo Drive. Browse all autonomous vehicle sensors and components, or talk to our engineering team about integration in your project.